SaM - MEMS Membranes

Remeber:

The structure of a MEMS membrane has this structure:

• $\rho$ : distance from the center.
• $D_z(\rho )$ : deflection with respect to the rest position $z_0$, given $\rho$.7
• A MEMS membrane is a primary sensor that transforms a preassure into a deformation, following this formula:${\overline{D}}_z=\frac{(3-{\nu }^2)R^4}{16E{t}^2}\Delta p$We can simplify it like so:${\overline{D}}_z=\alpha \Delta p$Where:
  • ${\overline{D}}_z$ is the average deflection across the whole membrane, and as a metter of fact for a circular membrane it follows this rule: ${\overline{D}}_z=\frac{1}{3}{D}_z(0)$.
  • $\Delta p$ is the difference in preassure, under and above the membrane, $\Delta p=p_{\text{above}}-p_{\text{under}}$.
  • $E$ and $\nu$ are the Young and Poisson modulus
  • Note that it is a linear sensor.

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