We take the primary sensor mass spring damper and we think of a fixed frame, as we have seen for strain gauges.
Ms : sismic mass.
K : spring coefficient.
λ : damper coefficient.
A(s)=L[a(t)], where a(t): acceleration
R(s)=L[r(t)]l, where r(t): displacemente between the resting position of the sismic mass and actual positon.
r∞=KMSa0 : obtaing by using the final value theorem:lims→0s⋅F(s)=limt→∞f(t)In this case we are ander the hypotesis of a constant acceleration (a0)
αr : sensitivity
In this case, I have a sensor, which can turn an acceleration into a variation of a capacitance.
The capacitance value of capacitive accelerometer can calculated as:C=1+αa0C0Where: