SaM - MEMS Cantilever

Remeber:

• “Cantilever” in italian: “Mensola”, “Trave a sbalzo”
• Primary sensor for force are Deformable Structures and Cantilevers.
• Deformable Structures change a force in a displacement:
  
• While Cantilevers change a force in a deflection or in two strains (an elongation and a compession):
  
• ==Both primary sensor apply a linear transformation to the force.==
  That is, the “new quantity output” is the force scaled by a constant, decided by the specifics of the sensor:$\text{new\_quantity}=\alpha \cdot F$More specifically:
  • $\epsilon ={\alpha }_{\text{stress}}\cdot F$
  • $D_z(x)={\alpha }_{\text{deflection}}\cdot F$
• The calculations of the coefficient for MEMS Cantilever are quite complex both in case for transformation in deflection and in strains, but you need to remember that: ==using the MEMS Cantilever for converting into strain results in a DIFFERENTIAL PRIMARY SENSOR==, that means that the output is differential:
  
  • We can take advantage of a differential output using a Differential Amplifier.

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